Fundamentals of Micro Electromechan.syst.&microsyst.

Course content

Introduction; overview of Micro Electromechanical Systems (MEMS) and microsystems. Working principles of microsystems. Engineering science and engineering mechanics topics for Microsystems design and fabrication. Application of thermofluid engineering principles in microsystems design. Scaling laws and miniaturization. Materials for MEMS and microsystems. Microsystem manufacturing processes. Microsystem design and packaging.