Integrated Sensors and Sensor System

Course content

Fundamental principles, operation and design of integrated solid-state sensors and sensing systems. Sensor technology, including micromachining and wafer bonding. Microstructures for the measurement of visible and infrared radiation, pressure, acceleration, temperature, gas purity and ion concentrations. Merged process technologies for sensors and circuits. Data acquisition circuits and advanced sensing systems. Microactuators and integrated microsystems.